RF 마그네트론 스퍼터링 방법에 의한 $SrTiO_3$ 박막의 제조 및 특성 평가에 관한 연구Preparation and characterizations of $SrTiO_3$ thin films by RF maganetron sputtering

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Advisors
김호기researcherKim, Ho-Giresearcher
Description
한국과학기술원 : 무기재료공학과,
Publisher
한국과학기술원
Issue Date
1993
Identifier
60670/325007 / 000885129
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 무기재료공학과, 1993.2, [ iv, 129 p. ]

URI
http://hdl.handle.net/10203/50304
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60670&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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