Arsenic 이온이 주입된 실리콘에서 결함 생성에 관한 투과전자현미경 연구A transmission electron microscopy study on the generation of defects in $As^+$ implanted silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정용 | - |
| dc.contributor.advisor | Lee, Jeong-Yong | - |
| dc.contributor.author | 신유균 | - |
| dc.contributor.author | Shin, Yu-Gyun | - |
| dc.date.accessioned | 2011-12-15T01:04:08Z | - |
| dc.date.available | 2011-12-15T01:04:08Z | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174588&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50248 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ xi, 136 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 응력 | - |
| dc.subject | 결함 | - |
| dc.subject | 이온주입 | - |
| dc.subject | 투과전자현미경 | - |
| dc.subject | Transmission electron microscopy | - |
| dc.subject | stress | - |
| dc.subject | Defect | - |
| dc.subject | Arsenic implantation | - |
| dc.title | Arsenic 이온이 주입된 실리콘에서 결함 생성에 관한 투과전자현미경 연구 | - |
| dc.title.alternative | A transmission electron microscopy study on the generation of defects in $As^+$ implanted silicon | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 174588/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000985197 | - |
| dc.contributor.localauthor | 신유균 | - |
| dc.contributor.localauthor | Shin, Yu-Gyun | - |
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