Sb 첨가를 통한 PZT박막의 electrical degradation mechanism에 관한 연구 = A study on the electrical degradation mechanism in PZT thin films by Sb addition

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Advisors
김호기researcherKim, Ho-Giresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1998
Identifier
143467/325007 / 000955393
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ iv, 135 p. ]

Keywords

피로; 전기적 열화; d.c. 반응성 스퍼터링; PZT박막; PZT thin film; Fatigue; Electrical degradation; d.c. reactive sputtering

URI
http://hdl.handle.net/10203/50226
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143467&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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