Reactive magnetron sputter ion plating법으로 증착된 TiN 박막의 증착 특성 및 침식 특성에 관한 연구Deposition characteristics and liquid impingement erosion properties of TiN film fabricated by reactive magnetron sputter ion plating
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 143459/325007 / 000945282
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.2, [ xiii, 165 p. ]
- Keywords
티타늄나이트라이드; 이온 플레이팅; 침식; Liquid impact erosion; TiN; Ion plating
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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