반응성 스퍼터링법에 의해 제조된 PZT 박막의 특성 평가와 압전형 미소기동기 제작에 관한 연구A study on the properties of PZT films prepared by reactive sputtering method and the fabrication of piezoelectric microactuator

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1998
Identifier
143454/325007 / 000945141
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ v, 171 p. ]

Keywords

마이크로머시닝; 압전; 페롭스카이트; 스퍼터링; 미소기동기; Microactuator; Micromachining; Perovskite:Piezoelectric; Sputtering; PZT

URI
http://hdl.handle.net/10203/50216
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143454&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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