학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ v, 171 p. ]
마이크로머시닝; 압전; 페롭스카이트; 스퍼터링; 미소기동기; Microactuator; Micromachining; Perovskite:Piezoelectric; Sputtering; PZT
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