Cu/TiN/Ti/Si 다층막의 열처리에 관한 연구A study on the annealing of the Cu/TiN/Ti/Si Multilayer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.advisor | Chyun, Soung-Soon | - |
| dc.contributor.author | 라사균 | - |
| dc.contributor.author | Rha, Sa-Kyun | - |
| dc.date.accessioned | 2011-12-15T01:02:56Z | - |
| dc.date.available | 2011-12-15T01:02:56Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128140&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50178 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ iii, 151 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 티타늄 나이트라이드 | - |
| dc.subject | 확산방지 | - |
| dc.subject | 배선재료 | - |
| dc.subject | Copper | - |
| dc.subject | Annealing | - |
| dc.subject | Titaniun nitride | - |
| dc.subject | Diffusion barrier | - |
| dc.subject | Interconnection | - |
| dc.subject | 구리 | - |
| dc.subject | 열처리 | - |
| dc.title | Cu/TiN/Ti/Si 다층막의 열처리에 관한 연구 | - |
| dc.title.alternative | A study on the annealing of the Cu/TiN/Ti/Si Multilayer | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 128140/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000945148 | - |
| dc.contributor.localauthor | 라사균 | - |
| dc.contributor.localauthor | Rha, Sa-Kyun | - |
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