Cu/TiN/Ti/Si 다층막의 열처리에 관한 연구 = A study on the annealing of the Cu/TiN/Ti/Si Multilayer

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 374
  • Download : 0
Advisors
박종욱researcher천성순researcherPark, Chong-OokresearcherChyun, Soung-Soonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
128140/325007 / 000945148
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ iii, 151 p. ]

Keywords

티타늄 나이트라이드; 확산방지; 배선재료; Copper; Annealing; Titaniun nitride; Diffusion barrier; Interconnection; 구리; 열처리

URI
http://hdl.handle.net/10203/50178
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128140&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0