금속흡착에 의한 LPCVD 비정질 실리콘 박막의 저온 결정화에 관한 연구A study on low temperature crystallization of LPCVD amorphous Si using metal adsorption method
- Advisors
- 안병태researcher; Ahn, Byung-Taeresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 113012/325007 / 000935188
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ xvi, 208 p. ]
- Keywords
비정질 실리콘; 금속흡착; 저온결정화; 결정질 실리콘; Polycrystalline silicon; Amorphous silicon; Metal adosrption; Low temperature crystallization
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.