ECR PE-MOCVD법에 의해 증착된 $PbTiO_3$, PLT 박막의 특성에 관한 연구A study on the characteristics of $PbTiO_3$, PLT thin films deposited by ECR PE-MOCVD

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
108845/325007 / 000925334
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ iv, 190 p. ]

Keywords

박막; 강유전체; 페로브스카이트; PLT; 금속유기화학증착법; 플라즈마화학증착법; 전자자기공명; DRAM; DRAM; Film; Ferroelectric; Perovskite; PLT; ECR; PECVD; MOCVD

URI
http://hdl.handle.net/10203/50156
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108845&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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