학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ [ii], 77 p. ]
금속유기화학증착법; PZT; 페로브스카이트; 강유전체; DRAM.; ECR; PECVD; MOCVD; PZT; Perovskite; Ferroelectric; DRAM; 전자자기공명; 플라즈마화학증착법
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