$BF_2^+$ 이온주입된 실리콘의 격자손상이 불순물 농도분포에 미치는 영향Effects of lattice damage on impurity depth profiles in $BF_2^+$ ion implanted silicon
- Advisors
- 임호빈researcher; Im, Ho-Binresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 61586/325007 / 000805120
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ v, 104 p. ]
- Keywords
격자 손상
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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