Blanket 텅스텐 증착에 있어서 $WF_6$-$SiH_4$-$H_2$ 혼합기체와 TiN Glue Layer 간의 초기 반응에 관한 연구A study on the initial reactions of $WF_6$-$SiH_4$-$H_2$ gas mixture with TiN Glue Layer for Blanket tungsten deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천송순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 이영종 | - |
| dc.contributor.author | Lee, Young-Jong | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69693&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49913 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1994.8, [ vi, 115 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Chemical vapor deposition. | - |
| dc.title | Blanket 텅스텐 증착에 있어서 $WF_6$-$SiH_4$-$H_2$ 혼합기체와 TiN Glue Layer 간의 초기 반응에 관한 연구 | - |
| dc.title.alternative | A study on the initial reactions of $WF_6$-$SiH_4$-$H_2$ gas mixture with TiN Glue Layer for Blanket tungsten deposition | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 69693/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000855300 | - |
| dc.contributor.localauthor | 이영종 | - |
| dc.contributor.localauthor | Lee, Young-Jong | - |
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