실리콘계 유전 박막의 원자층 증착에 관한 연구Atomic layer deposition of Si-based dielectric thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.author | 이주현 | - |
| dc.contributor.author | Lee, Joo-Hyeon | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237605&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49800 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ ix, 115 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 원자층 증착 | - |
| dc.subject | ATOMIC LAYER DEPOSITION | - |
| dc.title | 실리콘계 유전 박막의 원자층 증착에 관한 연구 | - |
| dc.title.alternative | Atomic layer deposition of Si-based dielectric thin films | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 237605/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020005248 | - |
| dc.contributor.localauthor | 이주현 | - |
| dc.contributor.localauthor | Lee, Joo-Hyeon | - |
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