PZT 박막 커패시터의 내수소열화 특성 향상에 관한 연구 = A study on the improvement of the resistance to the hydrogen-induced degradation of the PZT thin film capacitors

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 신소재공학학제전공,
Publisher
한국과학기술원
Issue Date
2002
Identifier
174559/325007 / 000929093
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학학제전공, 2002.2, [ xii, 132 p. ]

Keywords

산소 공공; 강유전체 메모리; 수소 열화; Hydrogen-induced Degradation; LNO; PZT; Oxygen vacancy; Ferroelectric memory

URI
http://hdl.handle.net/10203/49776
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174559&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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