PZT 박막 커패시터의 내수소열화 특성 향상에 관한 연구A study on the improvement of the resistance to the hydrogen-induced degradation of the PZT thin film capacitors
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 신소재공학학제전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2002
- Identifier
- 174559/325007 / 000929093
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학학제전공, 2002.2, [ xii, 132 p. ]
- Keywords
산소 공공; 강유전체 메모리; 수소 열화; Hydrogen-induced Degradation; LNO; PZT; Oxygen vacancy; Ferroelectric memory
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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