Growth of tailored carbon nanotube arrays via block copolymer lithography = 블록 공중합체 리소그래피를 이용한 맞춤형 탄소나노튜브 어레이의 성장에 관한 연구

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Carbon nanotubes (CNTs) are of broad technological interest in electronics, photonics, energy devices, and other applications. However, establishing a straightforward process for mass production of uniform CNTs with desired structures and properties has been a long-standing challenge. In particular, it is highly desired to precisely control over the numbers of walls and diameter of CNTs, which are decisive parameters for the physical properties of CNTs. In this respect, the preparation of monodisperse catalyst array having a narrow size distribution is generally considered an effective pathway to produce well-defined CNTs, since the number of walls and diameter of the produced CNTs is closely related to the catalyst size. Catalytic chemical vapor deposition (CVD) has become a standard growth method for vertical or parallel CNT arrays. Plasma-enhanced CVD (PECVD) is particularly attractive, since the high-energy plasma environment enables low-temperature growth, high CNT alignment, and compatibility with conventional Si processes. Nevertheless, CVD methods suffer from low catalyst activity. Only a small fraction of the catalyst particles produce CNTs; the majority remain as undesired impurities due to contamination by amorphous carbon. For this reason oxygen-assisted CVD approaches have been developed. Oxygen-containing compounds, such as water ($H_2O$), alcohol ($CH_3OH$), and oxygen gas ($O_2$) has been included in the feed stream to remove undesired amorphous carbon contamination and promote highly efficient CNT growth. Ammonia ($NH_3$) has often been used as an environmental gas for PECVD growth of CNTs. The pretreatment of catalyst particles with $NH_3$ plasma results in a thin nitride layer on the catalyst surface, which suppresses catalyst deactivation by decomposing excessive carbon. As a constituent of the source gas, $NH_3$ is an effective source for the N-doping of CNTs. N-doping may greatly enhance the electrical conductivity of CNTs. When electro...
Lee, Won-Jongresearcher이원종researcher
한국과학기술원 : 신소재공학과,
Issue Date
455394/325007  / 020087052

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2010.08, [ xxiii, 214 p. ]


block copolymer; carbon nanotube; chemical vapor deposition; 화학기상증착법; 블록 공중합체; 탄소나노튜브

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