Synthesis of copolymers containing hydroxycyclohexyl methacrylate and their application as DUV resist히드록시시클로헥실 메타크릴레이트가 포함된 공중합체의 합성 및 원자외선 레지스트로서의 응용
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Kim, Jin-Baek | - |
| dc.contributor.advisor | 김진백 | - |
| dc.contributor.author | Kim, Jae-Young | - |
| dc.contributor.author | 김재영 | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143546&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49667 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 1998.8, [ xii, 94 p. ] | - |
| dc.language | eng | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Alicyclic methacrylate | - |
| dc.subject | Hydroxycyclohexyl methacrylate | - |
| dc.subject | DUV photoresist | - |
| dc.subject | Dry-etching resistance | - |
| dc.subject | 건식내에칭성 | - |
| dc.subject | 지방족 고리형 메타크릴레이트 | - |
| dc.subject | 히드록시시클로헥실 메타크릴레이트 | - |
| dc.subject | 원자외선 레지스트 | - |
| dc.title | Synthesis of copolymers containing hydroxycyclohexyl methacrylate and their application as DUV resist | - |
| dc.title.alternative | 히드록시시클로헥실 메타크릴레이트가 포함된 공중합체의 합성 및 원자외선 레지스트로서의 응용 | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 143546/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 000939063 | - |
| dc.contributor.localauthor | Kim, Jae-Young | - |
| dc.contributor.localauthor | 김재영 | - |
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