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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구 = A study on the etching characteristics of PZT films using Inductively coupled Plasmalink

정진기; Jung, Jin-Ki; 이원종; Lee, Won-Jong, 한국과학기술원, 2001

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