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Results 1-1 of 1 (Search time: 0.005 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
(A) study on the growth kinetic modeling for atomic layer deposition of multi-component thin films = 다성분계 박막의 ALD를 위한 박막성장의 동역학적 modeling에 관한 연구link

Kim, Jin-Hyock; 김진혁; Kang, Sang-Won; 강상원, 한국과학기술원, 2005

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