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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
반도체 배선용 구리 전기도금막의 Self-annealing 기구분석 = Analysis of self-annealing mechanism in electroplated Cu thin film for the interconnect of semiconductor deviceslink

이창희; Lee, Chang-Hee; 박종욱; Park, Chong-Ook, 한국과학기술원, 2003

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