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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
구리 박막과 반응성 플라즈마의 건식 식각반응 특성에 관한 연구 = A study on the characteristics of dry etch reactions between Cu thin film and reactive plasmaslink

권명석; Kwon, Myoung-Seok; 이정용; Lee, Jeong-Yong, 한국과학기술원, 1999

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