Theoretical study on heating characteristics of helicon discharge헬리콘 방전의 가열 특성에 관한 이론적 연구

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The Maxwell-Boltzmann equations are solved for a helicon discharge reactor. Utilizing the solution, we also calculate a total reactor impedance and various components of plasma resistance. And inspect dependence of the impedance on operational and geometrical parameters. A finite ion mass effect which have been ignored in considering the helicon discharge is inspected. Consequently, the ion effect can not be ignored because that it prominently changes TG(Trivelpiece Gould) mode characteristics and also result in great changes of the plasma impedance. Including the ion effect, a new cavity resonance appears which are absent in electron only case. In this resonance condition, the plasma resistance is inversely proportional to collision frequency and this is a clear evidence of resonant power coupling.
Advisors
Choi, Duk-In최덕인
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
2001
Identifier
165785/325007 / 000925127
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 2001.2, [ xii, 98 p. ]

Keywords

plasma; antenna; impedance; helicon; heating; 가열; 플라즈마; 안테나; 임피던스; 헬리콘

URI
http://hdl.handle.net/10203/47258
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165785&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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