공초점과 헤테로다인 간섭 원리를 이용한 측정시스템의 제안 및 측정 성능 향상에 관한 연구Improvement of measurement performance by using heterodyne differential interferometry and confocal microscopy
- Advisors
- 권대갑researcher; Gweon, Dae-Gabresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 237896/325007 / 020023172
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ v, 73 p. ]
- Keywords
2 파이 모호성; 공초점 주사 현미경; 헤테로다인 디퍼런셜 간섭계; Heterodyne differential interferometer; 2 pi ambiguity; confocal scanning microscopy
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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