표면 형상측정을 위한 큰 등가파장 회절격자 간섭계 = Diffraction grating interferometer of large equivalent wavelength for surface flatness testing

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 283
  • Download : 0
DC FieldValueLanguage
dc.contributor.advisor김승우-
dc.contributor.advisorKim, Seung-Woo-
dc.contributor.author황태준-
dc.contributor.authorHwang, Tae-Joon-
dc.date.accessioned2011-12-14T06:36:40Z-
dc.date.available2011-12-14T06:36:40Z-
dc.date.issued2000-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158273&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/45201-
dc.description학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 34 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject기준측정평면-
dc.subject표면 형상측정-
dc.subject등가파장-
dc.subject회절격자 간섭계-
dc.subject등가파장보정-
dc.subjectEquivalent wavelength calibration-
dc.subjectReference measurement plane-
dc.subjectSurface flatness testing-
dc.subjectEquivalent wavelength-
dc.subjectDiffraction grating interferometer-
dc.title표면 형상측정을 위한 큰 등가파장 회절격자 간섭계 = Diffraction grating interferometer of large equivalent wavelength for surface flatness testing-
dc.typeThesis(Master)-
dc.identifier.CNRN158273/325007-
dc.description.department한국과학기술원 : 기계공학전공, -
dc.identifier.uid000983651-
dc.contributor.localauthor황태준-
dc.contributor.localauthorHwang, Tae-Joon-
Appears in Collection
ME-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0