표면 형상측정을 위한 큰 등가파장 회절격자 간섭계Diffraction grating interferometer of large equivalent wavelength for surface flatness testing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김승우 | - |
| dc.contributor.advisor | Kim, Seung-Woo | - |
| dc.contributor.author | 황태준 | - |
| dc.contributor.author | Hwang, Tae-Joon | - |
| dc.date.accessioned | 2011-12-14T06:36:40Z | - |
| dc.date.available | 2011-12-14T06:36:40Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158273&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/45201 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 34 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 기준측정평면 | - |
| dc.subject | 표면 형상측정 | - |
| dc.subject | 등가파장 | - |
| dc.subject | 회절격자 간섭계 | - |
| dc.subject | 등가파장보정 | - |
| dc.subject | Equivalent wavelength calibration | - |
| dc.subject | Reference measurement plane | - |
| dc.subject | Surface flatness testing | - |
| dc.subject | Equivalent wavelength | - |
| dc.subject | Diffraction grating interferometer | - |
| dc.title | 표면 형상측정을 위한 큰 등가파장 회절격자 간섭계 | - |
| dc.title.alternative | Diffraction grating interferometer of large equivalent wavelength for surface flatness testing | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 158273/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 000983651 | - |
| dc.contributor.localauthor | 황태준 | - |
| dc.contributor.localauthor | Hwang, Tae-Joon | - |
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