표면 형상측정을 위한 큰 등가파장 회절격자 간섭계 = Diffraction grating interferometer of large equivalent wavelength for surface flatness testing

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2000
Identifier
158273/325007 / 000983651
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 34 p. ]

Keywords

기준측정평면; 표면 형상측정; 등가파장; 회절격자 간섭계; 등가파장보정; Equivalent wavelength calibration; Reference measurement plane; Surface flatness testing; Equivalent wavelength; Diffraction grating interferometer

URI
http://hdl.handle.net/10203/45201
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158273&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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