기구학적 커플링을 이용한 3축 정밀 스테이지의 설계, 특성분석 및 타원편광분석기 입사각 정렬에의 응용Design, analysis of 3-axis precision stage using kinematic coupling and an application to incident angle alignment of ellipsometer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권대갑 | - |
| dc.contributor.advisor | Gweon, Dae-Gab | - |
| dc.contributor.author | 정재화 | - |
| dc.contributor.author | Jeong, Jae-Hwa | - |
| dc.date.accessioned | 2011-12-14T06:36:28Z | - |
| dc.date.available | 2011-12-14T06:36:28Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158261&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/45189 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 57 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 타원편광분석기 | - |
| dc.subject | 3축 스테이지 | - |
| dc.subject | 기구학적 커플링 | - |
| dc.subject | 입사각 정렬 | - |
| dc.subject | Incident angle alignment | - |
| dc.subject | Ellipsometer | - |
| dc.subject | 3-Axis stage | - |
| dc.subject | Kinematic coupling | - |
| dc.title | 기구학적 커플링을 이용한 3축 정밀 스테이지의 설계, 특성분석 및 타원편광분석기 입사각 정렬에의 응용 | - |
| dc.title.alternative | Design, analysis of 3-axis precision stage using kinematic coupling and an application to incident angle alignment of ellipsometer | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 158261/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 000983541 | - |
| dc.contributor.localauthor | 정재화 | - |
| dc.contributor.localauthor | Jeong, Jae-Hwa | - |
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- ME-Theses_Master(석사논문)
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