기구학적 커플링을 이용한 3축 정밀 스테이지의 설계, 특성분석 및 타원편광분석기 입사각 정렬에의 응용Design, analysis of 3-axis precision stage using kinematic coupling and an application to incident angle alignment of ellipsometer
- Advisors
- 권대갑researcher; Gweon, Dae-Gabresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2000
- Identifier
- 158261/325007 / 000983541
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 57 p. ]
- Keywords
타원편광분석기; 3축 스테이지; 기구학적 커플링; 입사각 정렬; Incident angle alignment; Ellipsometer; 3-Axis stage; Kinematic coupling
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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