기구학적 커플링을 이용한 3축 정밀 스테이지의 설계, 특성분석 및 타원편광분석기 입사각 정렬에의 응용 = Design, analysis of 3-axis precision stage using kinematic coupling and an application to incident angle alignment of ellipsometer

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Advisors
권대갑researcherGweon, Dae-Gabresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2000
Identifier
158261/325007 / 000983541
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 57 p. ]

Keywords

타원편광분석기; 3축 스테이지; 기구학적 커플링; 입사각 정렬; Incident angle alignment; Ellipsometer; 3-Axis stage; Kinematic coupling

URI
http://hdl.handle.net/10203/45189
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158261&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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