학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ vii, 63 p. ]
최적설계; 압전소자; 원자현미경; 초정밀 3축 스테이지; PID제어; PID feedback controller; Optimal design; PZT; AFM; Precision XYZ-stage
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