Showing results 1 to 6 of 6
A comparative study of multiple and single pulse laser annealing for ultrashallow boron junction formation Cho, Byung Jin; Poon, D; Lu, YF; Bhat, M; See, A, Ultra-Shallow Junctions-2003 Workshop, pp.0 - 0, 2003-04-27 |
Investigation of PVD HfO2 MIM capacitors for Si RF and Mixed signal ICs application Cho, Byung Jin; Hang, H; Ding, SJ; Zhu, C; Rustagi, RC; Lu, YF; Li, MF, International semiconductor device research symposium, pp.0 - 0, 2003-12-10 |
Material and electrical characterization of HfO2 films for MIM capacitors applications Cho, Byung Jin; Hu, H; Zhu, C; Lu, YF; Zeng, JN; Wu, YH; Liew, YF, MRS Spring meeting, pp.0 - 0, 2003-04-22 |
Photoluminescene from silicon nanocrystals formed by pulsed laser deposition Cho, Byung Jin; Chen, XY; Lu, YF; Wu, YH; Song, WD; Hu, H, MRS Symposium, pp.13 - 13, 2003-04-22 |
Process optimization for multiple-pulse laser annealing of boron implanted silicon with germanium pre-amorphization Cho, Byung Jin; Poon, D; Lu, YF; Bhat, M; See, A, MRS Spring Meeting, pp.0 - 0, 2003-04-22 |
Silicon nanostructured films formed by pulsed-laser deposition in inert gas and reactive gas Cho, Byung Jin; Chen, XY; Lu, YF; Wu, YH; Hu, H, MRS Symposium, pp.19 - 19, 2003-04-21 |
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