Study on the heat transfer phenomena for flow and temperature sensors

Abstract

In this thesis, a flow sensor and a temperature sensor is developed for the analysis of transient and steady state heat transfer phenomena. For this purpose, experimental and numerical investigations are conducted. The present research work is divided into two parts. One is a thermal flow sensor part, and the other is a temperature sensor part. In the thermal flow sensor part, a Mass Flow Controller (MFC) mainly used for measuring the mass flow rate is investigated through using experiments and simple models. Through the transient and steady states thermal investigation of the MFC, we present simple numerical models and the correlations for predicting a response time and the full scale flow range of the MFC. In the thermal temperature sensor part, A Diode Temperature Sensor Array (DTSA) is developed for spatially and temporally resolved measurements of temperature fluctuations on the micro scale surface. The DTSA is simply applied for evaluating the thermal effects of underfill materials in order to demonstrate the feasibility of the DTSA. The DTSA signal board and DTSA temperature controller are also developed for measuring and controlling the temperature of the DTSA surface. The DTSA may be also applied to various micro systems such as a micro-PCR device, Thermal Fingerprint Recognition, etc which typically require the highly integrated temperature sensors in a small area.