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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Theses_Ph.D.(박사논문)

단축 결상 분광기를 이용한 분광 결상 타원계측기Spectral imaging ellipsometer with mono axial power spectrograph

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제갈원 / Che, Gal-Won
Advisors
김수현researcher; Kim, Soo-Hyunresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2003
Identifier
231060/325007  / 000985359
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 기계공학전공, 2003.8, [ viii, 99 p. ]

Keywords

박막 두께 측정; 결상 분광기; 분광 결상 타원계측기; 타원계측기; 타원계측법; ellipsometry; thin film thickness measurement; spectrograph; spectral imaging ellipsometer; ellipsometer

URI
http://hdl.handle.net/10203/43479
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=231060&flag=dissertation
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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