Investigation into nano-stereolithography process for fabrication of precise three-dimensional microstructures = 극미세 3차원 형상의 정밀제작을 위한 나노 스테레오리소그래피 공정에 관한 연구

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Fabrication techniques of nano-patterns and three-dimensional (3D) microstructures are of great importance in diverse fields of modern technology, such as nanotechnology (NT), biotechnology (BT), and information technology (IT), for the development of highly functional applications: micro/nanofluidic devices, biochips, photonic crystals, and nano/micro-electromechanical systems (N/MEMS). For these purposes, many novel 3D microfabrication techniques have been developed, for examples, microstereolithography, nano-imprint lithography, soft-lithography, electrochemical fabrication (EFAB), localized electrochemical deposition, LIGA process, and many others. Using these techniques, diverse micro-devices can be built with various engineering materials such as polymers, metals, and ceramics. However, most of the existing microfabrication processes, except the microstereolithography, were developed for two-dimensional (2D) based microfabrication, thus they do not have the ability to build completely real 3D microstructures which are applicable to neo-conceptive devices. Recently, considerable efforts focusing on two-photon polymerization (TPP) have been put forth in the area of 2D and 3D nano/microfabrication. Since TPP first came out as a novel technique over a decade ago, a great number of micro-objects have been fabricated using TPP with a variety of effective two-photon chromophores. In TPP, when a near-infrared ultrashort-pulsed laser is closely focused into a volume of photocurable resins, real 3D microstructures can be fabricated using a layer-by-layer accumulating technique; therefore, TPP is considered to be a promising technique for real 3D nano/microfabrication. Recent reports have shown that the spatial resolution of TPP is achieved at approximately sub-100 nm scale employing a radical quenching mechanism, and a few studies have been carried out especially based on improving the fabrication efficiency and precision of TPP. In addition, many research wor...
Advisors
Yang, Dong-Yolresearcher양동열researcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2006
Identifier
310357/325007  / 020015831
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 기계공학전공, 2006.8, [ xviii, 187 p. ]

Keywords

Nanostereolithography; three-dimensional microstructures; femtosecond laser; two-photon polymerization; 나노스테레오리소그래피; 3차원 극미세 형상; 펨토초 레이저; 이광자 광중합; Nanostereolithography; three-dimensional microstructures; femtosecond laser; two-photon polymerization; 나노스테레오리소그래피; 3차원 극미세 형상; 펨토초 레이저; 이광자 광중합

URI
http://hdl.handle.net/10203/43381
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=310357&flag=dissertation
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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