학위논문(박사) - 한국과학기술원 : 기계공학전공, 2008. 8., [ xi, 116 p. ]
ellipsometry; polarization; objective lens; focused-beam; 타원 계측기; 편광; 박막 측정; ellipsometry; polarization; objective lens; focused-beam; 타원 계측기; 편광; 박막 측정
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