간섭원리를 이용한 이송축의 진직 운동 정확도 측정Measurement of moving accuracy of a precision machine axis with laser interferometry
- Advisors
- 김승우researcher; Kim, Seung-Wooresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2000
- Identifier
- 158012/325007 / 000945352
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vii, 135 p. ]
- Keywords
운동 정밀도; 위치결정정도; 레이저 간섭계; 광위상간섭계; Twyman-Green interferometry; 5-axis Tilt Error; Linear accuracy; Laser interferometer
- Appears in Collection
- ME-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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