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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Theses_Ph.D.(박사논문)

백색광 주사 간섭계를 이용한 표면 형상 측정 알고리즘에 관한 연구An algorithm of surface heights measurement based-on white-light scanning interferometry

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강민구 / Kang, Min-Gu
Advisors
김승우researcher; Kim, Seung-Wooresearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1999
Identifier
150539/325007 / 000955001
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 기계공학과, 1999.2, [ viii, 103 p. ]

Keywords

Surface metrology; White light scanning interferometry; White light phase shifting; Self-calibration of PZT scanning errors; Fringe peak detection of interferograms

URI
http://hdl.handle.net/10203/42961
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150539&flag=dissertation
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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