이중서보를 이용한 초정밀 X-Y 테이블 평면 3자유도 위치제어 = 3-Axis dual-servo control of an XYTheta-stage for ultraprecision positioning

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
114376/325007 / 000925292
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 기계공학과, 1997.2, [ ix, 137 p. ]

Keywords

초정밀 스테이지; 글로벌 서보; 마이크로 서보; 이중서보; 실시간 보상; Real time correction; Ultraprecision stage; Global servo; Micro servo; Dual servo

URI
http://hdl.handle.net/10203/42849
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114376&flag=dissertation
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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