학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2009.2, [ viii, 67 p. ]
MEMS; NEMS; cantilever; modeling; switch; 멤스; 넴스; 캔틸레버; 모델링; 스위치; MEMS; NEMS; cantilever; modeling; switch; 멤스; 넴스; 캔틸레버; 모델링; 스위치
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