광-CVD와 ECR-CVD를 이용한 비정질 실리콘 박막 트랜지스터의 제작 및 특성 평가Fabrication and characterization of amorphous silicon thin film transistor using photo-CVD and ECR-CVD method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 임굉수 | - |
| dc.contributor.advisor | Lim, Koeng-Su | - |
| dc.contributor.author | 강태웅 | - |
| dc.contributor.author | Kang, Tae-Woong | - |
| dc.date.accessioned | 2011-12-14T02:01:54Z | - |
| dc.date.available | 2011-12-14T02:01:54Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105942&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/38326 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1996.2, [ 52 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 광화학기상증착법 | - |
| dc.subject | 비정질 실리콘 박막 트랜지스터 | - |
| dc.subject | 전자공명화학기상증착법 | - |
| dc.subject | ECR-CVD | - |
| dc.subject | Photo-CVD | - |
| dc.subject | A-Si TFT | - |
| dc.title | 광-CVD와 ECR-CVD를 이용한 비정질 실리콘 박막 트랜지스터의 제작 및 특성 평가 | - |
| dc.title.alternative | Fabrication and characterization of amorphous silicon thin film transistor using photo-CVD and ECR-CVD method | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 105942/325007 | - |
| dc.description.department | 한국과학기술원 : 전기 및 전자공학과, | - |
| dc.identifier.uid | 000943009 | - |
| dc.contributor.localauthor | 임굉수 | - |
| dc.contributor.localauthor | Lim, Koeng-Su | - |
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- EE-Theses_Master(석사논문)
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