광-CVD와 ECR-CVD를 이용한 비정질 실리콘 박막 트랜지스터의 제작 및 특성 평가 = Fabrication and characterization of amorphous silicon thin film transistor using photo-CVD and ECR-CVD method

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Advisors
임굉수researcherLim, Koeng-Suresearcher
Description
한국과학기술원 : 전기 및 전자공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
105942/325007 / 000943009
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1996.2, [ 52 p. ]

Keywords

광화학기상증착법; 비정질 실리콘 박막 트랜지스터; 전자공명화학기상증착법; ECR-CVD; Photo-CVD; A-Si TFT

URI
http://hdl.handle.net/10203/38326
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105942&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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