반응이온식각공정을 이용한 폴리머 광도파로 분할기의 제작Fabrication of polymeric waveguide splitters by $O_2$-reactive ion etching method
- Advisors
- 신상영researcher; Shin, Sang-Yungresearcher
- Description
- 한국과학기술원 : 전기및전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 114240/325007 / 000953459
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ iii, 51 p. ]
- Keywords
다중모드간섭; 반응이온식각; 폴리머; 광분할기; Optical splitter; MMI; RIE; Polymer
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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