활성영역이 유리 기판 내에 매몰된 새로운 구조의 다결정 실리콘 박막 트랜지스터 = Novel TFT with active layer buried in glass substrate

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dc.contributor.advisor김충기-
dc.contributor.advisor한철희-
dc.contributor.advisorKim, Choong-Ki-
dc.contributor.advisorHan, Chul-Hi-
dc.contributor.author한기호-
dc.contributor.authorHan, Ki-Ho-
dc.date.accessioned2011-12-14T01:38:54Z-
dc.date.available2011-12-14T01:38:54Z-
dc.date.issued1996-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106013&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/36852-
dc.description학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1996.2, [ iv, 56 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject화학-기계적 연마-
dc.subject다결정실리콘-
dc.subjectBuried island thin film transistor(BITFT)-
dc.subjectChemical mechanical polishing(CMP)-
dc.subject매몰 박막 트랜지스터-
dc.subjectPolycrystalline silicon-
dc.title활성영역이 유리 기판 내에 매몰된 새로운 구조의 다결정 실리콘 박막 트랜지스터 = Novel TFT with active layer buried in glass substrate-
dc.typeThesis(Master)-
dc.identifier.CNRN106013/325007-
dc.description.department한국과학기술원 : 전기 및 전자공학과, -
dc.identifier.uid000943569-
dc.contributor.localauthor김충기-
dc.contributor.localauthor한철희-
dc.contributor.localauthorKim, Choong-Ki-
dc.contributor.localauthorHan, Chul-Hi-
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EE-Theses_Master(석사논문)
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