Hydrogen sensor with a thick catalyst layer anchored on soda-lime glass

Abstract

Hydrogen is a green energy source with zero pollutant emissions and increasing demand. Hydrogen sensors are required due to the flammable nature of hydrogen in air. Current catalytic combustion hydrogen sensors based on membrane platforms strike a balance between sensitivity and mechanical strength. A thick catalyst layer allows enhanced sensor sensitivity, producing an acceptable sensor signal change. A hydrogen sensor with a thick catalyst layer is introduced on soda-lime glass, which has low thermal conductivity and prefabricated catalyst anchoring channels. The hydrogen sensor is composed of a 44 Ω platinum sensing electrode and a 100 Ω gold microheater, both of which are coated with a thin layer of alumina. The sensing electrode is buried in the catalyst anchoring channels with a 10 μm depth and 78 μm width using a hydrogen combustible catalyst. The response for 1 % H2 in air is 9.43 % in a test chamber at 80 °C with a response time of 48 s and recovery time of 75 s. The calculated temperature increment due to catalytic combustion is 84 °C. A hydrogen sensor with a thick catalyst layer on soda-lime glass shows enhanced heat generation, resulting in an improved thermoresistive response, and consistent mechanical support.