PEALD Deposition of Ferroelectric HfO2
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Sung, Sanghyeon | ko |
| dc.contributor.author | Kim, Kyungbae | ko |
| dc.contributor.author | Lee, Keon Jae | ko |
| dc.date.accessioned | 2023-11-21T10:00:41Z | - |
| dc.date.available | 2023-11-21T10:00:41Z | - |
| dc.date.created | 2023-11-21 | - |
| dc.date.created | 2023-11-21 | - |
| dc.date.issued | 2023-07-05 | - |
| dc.identifier.citation | The 21st International Nanotech Symposium & Exhibition | - |
| dc.identifier.uri | http://hdl.handle.net/10203/314989 | - |
| dc.language | English | - |
| dc.publisher | Ministry of Science and ICT | - |
| dc.title | PEALD Deposition of Ferroelectric HfO2 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The 21st International Nanotech Symposium & Exhibition | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | KINTEX | - |
| dc.contributor.localauthor | Lee, Keon Jae | - |
| dc.contributor.nonIdAuthor | Kim, Kyungbae | - |
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