학위논문(석사) - 한국과학기술원 : 기계공학과, 2023.2,[vi , 59 p. :]
초정밀 형상측정▼a절대거리측정▼a펨토초 레이저 광빗▼a다파장 간섭계▼a합치법; ultra-precision surface metrology▼aabsolute distance measurement▼afemtosecond laser▼amulti-wavelength interferometer▼aexact fraction method
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