Electrochemical machining process for fabrication of cylindrical microprobe원통형 마이크로 프로브 제조를 위한 전기 화학적 가공 공정

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Disclosed is an electrochemical machining process for fabrication of cylindrical microprobes, which is effected by the tool acting as the cathode against the workpiece acting as the anode, taking advantage of a chemical reaction occurring between the workpiece and the tool, both being beneath the surface of an electrolyte, under such a controlled electric field that the workpiece can be machined to have a uniform diameter throughout its entire length. The electrochemical machining can be carried out with greater precision because a precise machining process because the volume to be additionally processed owing to the surface tension generated when the workpiece is dipped into the electrolyte is taken into consideration.
Assignee
KAIST
Country
US (United States)
Application Date
2000-11-03
Application Number
09706292
Registration Date
2002-06-04
Registration Number
06398942
URI
http://hdl.handle.net/10203/303100
Appears in Collection
ME-Patent(특허)
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