SEMICONDUCTOR DEVICE INCLUDING A GATE PITCH AND AN INTERCONNECTION LINE PITCH AND A METHOD FOR MANUFACTURING THE SAME게이트 피치 및 배선 라인 피치를 포함하는 반도체 장치와 동일한 것을 제조하기 위한 방법

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A semiconductor device includes a substrate including a PMOSFET region and an NMOSFET region. First active patterns are on the PMOSFET region. Second active patterns are on the NMOSFET region. Gate electrodes intersect the first and second active patterns and extend in a first direction. First interconnection lines are disposed on the gate electrodes and extend in the first direction. The gate electrodes are arranged at a first pitch in a second direction intersecting the first direction. The first interconnection lines are arranged at a second pitch in the second direction. The second pitch is smaller than the first pitch.
Assignee
KAIST, SAMSUNG ELECTRONICS CO LTD
Country
US (United States)
Application Date
2020-02-14
Application Number
16791964
Registration Date
2022-07-26
Registration Number
11398499
URI
http://hdl.handle.net/10203/297994
Appears in Collection
EE-Patent(특허)
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