32 x 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

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We report on a 32 x 32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-on-insulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 Vand the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Issue Date
2021-04
Language
English
Article Type
Article
Citation

JOURNAL OF OPTICAL MICROSYSTEMS, v.1, no.2

ISSN
2708-5260
DOI
10.1117/1.JOM.1.2.024003
URI
http://hdl.handle.net/10203/285861
Appears in Collection
EE-Journal Papers(저널논문)
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