(A) study on atomic layer deposition-assisted oxide thin film diode and its application to wearable platform = 원자층 증착법을 활용한 산화물 박막 다이오드의 이해 및 웨어러블 플랫폼 응용

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dc.contributor.advisorPark, Sang-Hee-
dc.contributor.advisor박상희-
dc.contributor.authorYeom, Hye-In-
dc.date.accessioned2021-05-12T19:46:09Z-
dc.date.available2021-05-12T19:46:09Z-
dc.date.issued2020-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=926267&flag=dissertationen_US
dc.identifier.urihttp://hdl.handle.net/10203/284483-
dc.description학위논문(박사) - 한국과학기술원 : 신소재공학과, 2020.8,[x, 102 p. :]-
dc.description.abstractRectifying diodes have been emerging as one of promising components for advanced functional devices including resistive random access memory and backplanes of active-matrix system. Among various types of diodes, metal-insulator-oxide semiconductor diodes have been extensively studied for their outstanding stability and rectifying characteristics. In this dissertation, we developed an ALD-assisted oxide thin film diode by interface engineering, and obtained high on/off ratio of ~ $10^8$, low off current density of $10^{-9} A/cm^2$ and good reliability. Also, we studied an exact mechanism of current flow through various chemical and electrical analysis. Furthermore, we utilized the diodes to demonstrate an active-matrix platform for a wearable electronic system. Consequently, a wearable active-matrix pressure sensor array based on a contact resistive sensor was successfully developed and characterized.-
dc.languageeng-
dc.publisher한국과학기술원-
dc.subjectOxide semiconductor▼aAtomic layer deposition method▼aDiode▼aPressure sensor▼aActive-matrix-
dc.subjectwearable device-
dc.subject산화물 반도체▼a원자층 증착법▼a다이오드▼a압력센서▼a능동형 매트릭스▼a웨어러블 소자-
dc.title(A) study on atomic layer deposition-assisted oxide thin film diode and its application to wearable platform = 원자층 증착법을 활용한 산화물 박막 다이오드의 이해 및 웨어러블 플랫폼 응용-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN325007-
dc.description.department한국과학기술원 :신소재공학과,-
dc.contributor.alternativeauthor염혜인-
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MS-Theses_Ph.D.(박사논문)
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