DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Park, Sang-Hee | - |
dc.contributor.advisor | 박상희 | - |
dc.contributor.author | Yeom, Hye-In | - |
dc.date.accessioned | 2021-05-12T19:46:09Z | - |
dc.date.available | 2021-05-12T19:46:09Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=926267&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/284483 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2020.8,[x, 102 p. :] | - |
dc.description.abstract | Rectifying diodes have been emerging as one of promising components for advanced functional devices including resistive random access memory and backplanes of active-matrix system. Among various types of diodes, metal-insulator-oxide semiconductor diodes have been extensively studied for their outstanding stability and rectifying characteristics. In this dissertation, we developed an ALD-assisted oxide thin film diode by interface engineering, and obtained high on/off ratio of ~ $10^8$, low off current density of $10^{-9} A/cm^2$ and good reliability. Also, we studied an exact mechanism of current flow through various chemical and electrical analysis. Furthermore, we utilized the diodes to demonstrate an active-matrix platform for a wearable electronic system. Consequently, a wearable active-matrix pressure sensor array based on a contact resistive sensor was successfully developed and characterized. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Oxide semiconductor▼aAtomic layer deposition method▼aDiode▼aPressure sensor▼aActive-matrix | - |
dc.subject | wearable device | - |
dc.subject | 산화물 반도체▼a원자층 증착법▼a다이오드▼a압력센서▼a능동형 매트릭스▼a웨어러블 소자 | - |
dc.title | (A) study on atomic layer deposition-assisted oxide thin film diode and its application to wearable platform | - |
dc.title.alternative | 원자층 증착법을 활용한 산화물 박막 다이오드의 이해 및 웨어러블 플랫폼 응용 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :신소재공학과, | - |
dc.contributor.alternativeauthor | 염혜인 | - |
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