학위논문(석사) - 한국과학기술원 : 산업및시스템공학과, 2020.2,[ii, 46 p. :]
semiconductor equipment modeling▼amanufacturing performance▼amachine learning▼adeep neural network▼arecurrent neural network▼aDirichlet distribution; 반도체 장비 모델링▼a제조 성능▼a기계 학습▼a심층 인공 신경망▼a회귀 인공 신경망▼a디리클레 분포
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