Studies on optical properties and fabrication of microtube in group Ⅲ-Nitride semiconductors using PEC etching = 광전기화학 식각을 이용한 질화물 반도체 튜브 구조 제작 및 광 특성 분석에 관한 연구

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 36
  • Download : 0
Microstructures with various shapes are actively studied in the field of optics and have been recognized for their versatility and efficiency. Among them, three-dimensional tube structures have been used in various fields because of their effective interaction with surrounding media, spatial overlap between field regions and structures and ease of shape and size modulation. In this study, only a specific material was removed selectively in nitride semiconductors with different bandgap through the photoelectrochemical etching, and the tube structure was fabricated by strain relaxation. It was confirmed that the tube structure was relaxed under the compressive strain originated from the substrate causing the shift in the PL and Raman mode. The strain variation according to the position on the tube was stronger toward the center of the tube, and the change was slightly decreased at the edge. In addition, it was confirmed that the polarization characteristic appeared in the tube structure compared with the non-polarization in planar structure. From the results of this study, it is expected to be widely applied as a new platform of optical structure by controlling wavelength modulation and polarization degree and direction in single tube structure.
Advisors
Cho, Yong-Hoonresearcher조용훈researcher
Description
한국과학기술원 :물리학과,
Publisher
한국과학기술원
Issue Date
2020
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 2020.2,[ix, 66 p. :]

Keywords

microtube structure▼astrain relaxation▼aself-roll up▼aPEC etching▼apolarization; 마이크로 튜브 구조체▼a스트레인 풀림▼a자체 말림▼a광전기화학 식각▼a편광 특성

URI
http://hdl.handle.net/10203/283915
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=910060&flag=dissertation
Appears in Collection
PH-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0