Single frequency vertical piezoresponse force microscopy

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Piezoresponse force microscopy (PFM) uses a cantilever arm to track the electromechanical motion of the electric dipole moment to visualize the ferroelectric domain structure, which provides an important insight into the physics of switchable electric polarization-especially for memory devices and integrated microelectronics. Here, I provide a tutorial on single frequency vertical PFM, the most basic mode of PFM. I will start with the basic components of atomic force microscopy (AFM), including tip, cantilever, X-Y stage, Z actuator, and lock-in amplifier. Contact mode AFM will be briefly explained and discussed, where you can find two modes: constant deflection and constant height modes. Single-frequency vertical PFM splits the frequency domain of tip vibration into low and high frequencies and uses a low-pass filter to nullify any motion caused by topography (constant deflection). In contrast, the lock-in amplifier will pinpoint the vibration induced by the vertical piezoelectric strain along the sample's surface normal (constant height). This tutorial will provide an overall and detailed step by step instruction to conduct PFM imaging and piezoresponse hysteresis loop measurement using atomic force microscopy and a lock-in amplifier and teach how to interpret the PFM images and the piezoresponse hysteresis loops for various applications.
Publisher
AMER INST PHYSICS
Issue Date
2021-02
Language
English
Article Type
Article
Citation

JOURNAL OF APPLIED PHYSICS, v.129, no.5

ISSN
0021-8979
DOI
10.1063/5.0038744
URI
http://hdl.handle.net/10203/281756
Appears in Collection
MS-Journal Papers(저널논문)
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